Device and method for measuring and/or modifying surface features on a surface of a sample
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United States of America Patent
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Feb 2, 2021
Grant Date -
Aug 23, 2018
app pub date -
Aug 18, 2016
filing date -
Aug 19, 2015
priority date (Note) -
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Abstract
The present document describes a device for measuring and/or modifying surface features and/or sub-surface features on or below a surface of a sample. The system comprises a sample carrier, one or more heads, and a support structure. The support structure comprises a reference surface for providing a positioning reference. The heads are separate from the sample carrier and the support structure, and the device further comprises a pick and place manipulator arranged for positioning the heads at respective working positions. The manipulator comprises a gripper and an actuator for moving the gripper, wherein the actuator is arranged for providing a motion in a direction transverse to the reference surface. The gripper is arranged for engaging and releasing the respective heads from the transverse motion. The document also describes a method of measuring and/or modifying surface features on a surface of a sample.
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