Polishing pad and method for making the same

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United States of America Patent

PATENT NO 10906154
APP PUB NO 20180147690A1
SERIAL NO

15879841

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Abstract

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The present invention relates to a polishing pad and a method for making the same. The polishing pad includes a base layer and a polishing layer. The base layer has a first surface and a second surface. The polishing layer is disposed on the first surface of the base layer and has a plurality of second fibers, a polymeric elastomer and a plurality of pores. The second fibers are arranged irregularly and cross each other to form the pores, and the polymeric elastomer is attached to the second fibers and does not fill the pores.

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Patent Owner(s)

Patent OwnerAddress
SAN FANG CHEMICAL INDUSTRY CO LTDKAOHSIUNG CITY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feng, Chung-Chih Kaohsiung, TW 112 308
Fu, Tai-Yun Kaohsiung, TW 3 2
Hung, Yung-Chang Kaohsiung, TW 45 119
Lin, Chih-Yi Kaohsiung, TW 66 89
Lin, Jhih-Gong Kaohsiung, TW 2 1
Yao, I-Peng Kaohsiung, TW 79 189

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