Feeding process of chlorine fluoride

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United States of America Patent

PATENT NO 10899615
APP PUB NO 20190055124A1
SERIAL NO

16091178

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Abstract

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A chlorine fluoride feeding device and feeding process are provided that can stably generate industrially applicable chlorine fluoride (ClF), control flow rate, and provide continual feed.

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Patent Owner(s)

Patent OwnerAddress
KANTO DENKA KOGYO CO LTD3-2 MARUNOUCHI 2-CHOME CHIYODA-KU TOKYO 1000005 ?1000005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iketani, Yoshihiko Shibukawa, JP 8 7
Kato, Korehito Shibukawa, JP 15 15
Kawaguchi, Shinichi Shibukawa, JP 42 197
Kikuchi, Sho Shibukawa, JP 4 7
Sakurai, Yoshimasa Shibukawa, JP 2 2
Shibusawa, Yukinobu Shibukawa, JP 5 6
Takahashi, Yoshinao Tokyo, JP 13 15
Takizawa, Hiroki Shibukawa, JP 6 7

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