Fabric-independent multi-patterning
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United States of America Patent
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Jan 19, 2021
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N/A
app pub date -
May 16, 2019
filing date -
May 23, 2018
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Abstract
Disclosed systems and methods may support fabric-independent multi-patterning. A system may include a coloring constraint access engine and a fabric-independent multi-patterning engine. The coloring constraint access engine may be configured to access a set of coloring constraints to apply to geometric elements of a circuit design without accessing a fabric layer that defines a layout of the geometric elements of the circuit design, the set of coloring constraints applicable to multi-patterning the geometric elements of the circuit design to support manufacture of circuit layers using multiple manufacturing steps (e.g., via complementary lithographic masks). The fabric-independent multi-patterning engine may be configured to perform, independent of the fabric layer, a pattern coloring process according to the set of coloring constraints to determine a color assignment for the geometric elements, respectively.
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