Multiple integrated tips scanning probe microscope
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United States of America Patent
Stats
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Jan 19, 2021
Grant Date -
N/A
app pub date -
Feb 24, 2020
filing date -
Feb 26, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.
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International Classification(s)
- 2020 Application Filing Year
- G01Q Class
- 86 Applications Filed
- 66 Patents Issued To-Date
- 76.75 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 4 Age
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