In-situ chamber clean end point detection systems and methods using computer vision systems
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United States of America Patent
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Jan 19, 2021
Grant Date -
Apr 25, 2019
app pub date -
Sep 24, 2018
filing date -
Oct 20, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
A system includes a camera mounted external to and adjacent to a window of a processing chamber configured to process semiconductor substrates. The window allows the camera to view a component in the processing chamber. The camera is configured to generate a video signal indicative of a status of the component during a process being performed in the processing chamber. The system further includes a controller coupled to the processing chamber. The controller is configured to control the camera, process the video signal from the camera, determine the status of the component based on the processing of the video signal, and determine whether to terminate the process based on the status of the component.
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International Classification(s)
- G06N:COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL M....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- G06T:IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G06F:ELECTRIC DIGITAL DATA PROCESSING
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