Aluminum nitride film, acoustic wave device, filter, and multiplexer

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United States of America Patent

PATENT NO 10886887
APP PUB NO 20180375489A1
SERIAL NO

16001152

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Abstract

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An aluminum nitride film contains a Group IV element and a Group II or Group XII element, and an atomic composition ratio of the Group II or Group XII element to the Group IV element is less than 1.

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Patent Owner(s)

Patent OwnerAddress
TAIYO YUDEN CO LTDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishihara, Tokihiro Tokyo, JP 120 1896
Tanaka, Kuniaki Tokyo, JP 91 553

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