Probes with fiducial targets, probe systems including the same, and associated methods
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United States of America Patent
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Dec 29, 2020
Grant Date -
Jul 25, 2019
app pub date -
Jan 16, 2019
filing date -
Jan 19, 2018
priority date (Note) -
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Abstract
Probes with fiducial targets, probe systems including the same, and associated methods. The probes include a probe body, a probe beam, a probe tip configured to contact a device under test (DUT), and a fiducial target affixed to the probe beam. The fiducial target is configured to be visible to an optical system to determine a position of the probe tip relative to the DUT. The methods include methods of utilizing and/or manufacturing the probes.
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