Composition for surface treatment, and method for surface treatment using the same
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United States of America Patent
Stats
-
Dec 29, 2020
Grant Date -
Jun 13, 2019
app pub date -
Jun 26, 2017
filing date -
Aug 9, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention is to provide a means with which foreign matters remaining on a surface of a polished object to be polished can be sufficiently removed. The present invention relates to a composition for surface treatment for a polished object to be polished, including: a (co)polymer containing a structural unit A having a phosphonic acid group and a divalent (poly)oxyhydrocarbon group or a salt thereof; and water, wherein a content of the structural units A exceeds 50% by mole relative to the total structural units forming the (co)polymer.
First Claim
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International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 12 Citation Count
- H01L Class
- 95.69 % this patent is cited more than
- 5 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jun 29, 2028 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 29, 2032 |
