Manufacturing method of mask
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 15, 2020
Grant Date -
N/A
app pub date -
Sep 28, 2017
filing date -
Sep 28, 2017
priority date (Note) -
In Force
status (Latency Note)
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Importance

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Non-US Coverage
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Abstract
A manufacturing method of a mask sheet includes a film formation step for forming a metal layer provided with a plurality of openings on a mask substrate, and a shaping step for shaping the metal layer using pulse electrolysis.
First Claim
all claims..Other Claims data not available
Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- SHARP KABUSHIKI KAISHA
International Classification(s)

- 2017 Application Filing Year
- C23C Class
- 3339 Applications Filed
- 2148 Patents Issued To-Date
- 64.34 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Inuzuka, Masahiro | Sakai, JP | 8 | 6 |
# of filed Patents : 8 Total Citations : 6 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 5 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jun 15, 2028 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 15, 2032 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Jun 23, 2022 | P | Published | |
Oct 22, 2021 | STCT | INFORMATION ON STATUS: ADMINISTRATIVE PROCEDURE ADJUSTMENT | free format text: PROSECUTION SUSPENDED |
Jul 30, 2021 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KUNDU, SANDIPAN;BALANKUTTY, AJAY;KIM, BONG CHAN;AND OTHERS;SIGNING DATES FROM 20210601 TO 20210726;REEL/FRAME:057035/0032 Owner name: INTEL CORPORATION, CALIFORNIA |
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