Manufacturing method of mask

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United States of America Patent

PATENT NO 10865497
SERIAL NO

16472220

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Abstract

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A manufacturing method of a mask sheet includes a film formation step for forming a metal layer provided with a plurality of openings on a mask substrate, and a shaping step for shaping the metal layer using pulse electrolysis.

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Patent Owner(s)

  • SHARP KABUSHIKI KAISHA

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  • 2017 Application Filing Year
  • C23C Class
  • 3339 Applications Filed
  • 2148 Patents Issued To-Date
  • 64.34 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inuzuka, Masahiro Sakai, JP 8 6

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1055695351018101 - 1011 - 2021 - 3031 - 4041 - 5051 - 600501001502002503003504004505005506006507007508008509009501000105011001150

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