Phase shifter mask

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10852634
APP PUB NO 20190332003A1
SERIAL NO

16504831

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Abstract

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A phase shift mask (PSM) includes a light transmitting substrate. The PSM further includes a phase shifter over the light transmitting substrate, wherein the phase shifter includes a plurality of semiconductor layers and a plurality of dielectric layers stacked in an alternating fashion.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chun-Lang Madou Township, TW 55 312
Tu, Chih-Chiang Tauyen, TW 85 480
Yang, Shih-Hao Tainan, TW 14 20

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