Specimen observation method
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United States of America Patent
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Dec 1, 2020
Grant Date -
Feb 14, 2019
app pub date -
Mar 18, 2016
filing date -
Mar 18, 2016
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Abstract
A device for observing a specimen, such as a charged particle beam device exemplified by a scanning electron microscope and a transmission electron microscope in which an operator can specify minute bubbles with high contrast in a charged particle beam image of a liquid subjected to processing of generating bubbles, using a phenomenon in which contrast as high as an operator can specify minute bubbles is provided in a charged particle beam image of a specimen including an ionic liquid and a liquid subjected to processing of generating bubbles, thus making it possible to recognize minute bubbles in a liquid.
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