Microelectromechanical systems (MEMS) and methods

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10850974
APP PUB NO 20180162724A1
SERIAL NO

15571790

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present disclosure relates to a method of fabricating a reflector, the reflector being at least partially reflective and at least partially transmissive for at least a wavelength of electromagnetic radiation; the method comprising:

    forming a first material layer defining a bottom layer;forming a sacrificial layer on the bottom layer;forming a second material layer defining a top layer on the sacrificial layer and a supporting structure connected to the bottom layer; andremoving at least part of the sacrificial layer to form a cavity between the bottom layer and the top layer such that the supporting structure supports the top layer relative to the bottom layer and no further supporting structure is provided within the cavity,wherein after the at least part of the sacrificial layer is removed, at least the top layer has residual tensile stress.

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Patent Owner(s)

Patent OwnerAddress
THE UNIVERSITY OF WESTERN AUSTRALIA35 STIRLING HWY CRAWLEY WA 6009 AUSTRALIA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Antoszewski, Jarek Crawley, AU 5 63
Dell, John Marcel Crawley, AU 9 62
Faraone, Lorenzo Crawley, AU 20 324
Martyniuk, Mariusz Crawley, AU 8 24
Silva, Dilusha Crawley, AU 6 17
Tripathi, Dhirendra Crawley, AU 1 3

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