Electromechanical transducer
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United States of America Patent
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Nov 17, 2020
Grant Date -
Jul 18, 2019
app pub date -
Sep 26, 2017
filing date -
Sep 29, 2016
priority date (Note) -
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Abstract
Provided is an electromechanical transducer including a lightweight and impact-resistant movable member. The electromechanical transducer using electrostatic interaction between charged portions and opposing electrodes to convert between electric power and motive power includes: a movable member having first electrodes and first grooves in a first surface thereof and having second grooves in a second surface opposite to the first surface; and a fixed substrate having second electrodes and facing the first surface of the movable member. One of the first electrodes and the second electrodes are charged portions carrying electrostatic charge while the other of the first electrodes and the second electrodes are opposing electrodes facing the charged portions. The first and second electrodes are each disposed at intervals in a moving direction of the movable member. The first and second grooves do not penetrate the movable member in a thickness direction thereof and are alternately disposed in the moving direction.
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