Methods of forming a self-assembled block copolymer material

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United States of America Patent

PATENT NO 10828924
APP PUB NO 20180281499A1
SERIAL NO

16004063

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Abstract

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Methods for fabricating stamps and systems for patterning a substrate, and devices resulting from those methods are provided.

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Patent Owner(s)

Patent OwnerAddress
MICRON TECHNOLOGY INCIDAHO IDAHO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Millward, Dan B Boise, US 79 3379
Sandhu, Gurtej S Boise, US 1223 33846

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