Integrated measurement and micromechanical positioning apparatus for real-time test control
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United States of America Patent
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Nov 10, 2020
Grant Date -
Mar 14, 2019
app pub date -
Oct 13, 2015
filing date -
Oct 13, 2015
priority date (Note) -
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Abstract
The invention relates to a measurement device (120), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a sensor (150) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the having an input coupled to the sensor (150) for receiving a sensor signal from the sensor (150) to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the sensor signal. The measurement device (120) may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said sensor signal and said positioning control instructions (300).
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