Micromechanical resonator having reduced size
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 20, 2020
Grant Date -
Aug 8, 2019
app pub date -
Feb 7, 2018
filing date -
Feb 7, 2018
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A micromechanical resonator is provided that enables a smaller total package size with an acceptable quality factor for timing applications. The MEMS resonator includes a vibration portion with a base and three or more vibrating beams extending therefrom. Moreover, the MEMS resonator includes a frame that surrounds a periphery of the vibration portion and a pair of anchor between the vibrating beams for stabilizing the vibration portion within the frame. Furthermore, support beams couple the base of the vibration portion to the pair of anchors.
First Claim
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International Classification(s)
- 2018 Application Filing Year
- G04C Class
- 91 Applications Filed
- 70 Patents Issued To-Date
- 76.93 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G04C Class
- 0 % this patent is cited more than
- 5 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Apr 20, 2028 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 20, 2032 |
