Suspended grid structures for electrodes in vacuum electronics

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United States of America Patent

PATENT NO 10811212
SERIAL NO

16539943

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Abstract

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Disclosed embodiments include vacuum electronic devices and methods of fabricating a vacuum electronic device. In a non-limiting embodiment, a vacuum electronic device includes an electrode that defines discrete support structures therein. A first film layer is disposed on the electrode about a periphery of the electrode and on the support structures. A second film layer is disposed on the first film layer. The second film layer includes electrically conductive grid lines patterned therein that are supported by and suspended between the support structures.

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Patent Owner(s)

Patent OwnerAddress
MODERN ELECTRON INC18912 N CREEK PKWY S #100 BOTHELL WA 98011

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fabien, Chloe A M Seattle, US 8 3
Foley, Gary D Mill Creek, US 5 6
Koch, Andrew T Seattle, US 28 888
Kokonaski, William Edmonds, US 263 11226
Lingley, Andrew R Seattle, US 6 10
Mankin, Max N Seattle, US 47 254
Pan, Tony S Bellevue, US 281 4007
Sun, Yong Belle Mead, US 134 963

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