Manufacturing device control based on metrology data
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United States of America Patent
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Oct 20, 2020
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N/A
app pub date -
Jun 8, 2018
filing date -
Jun 8, 2018
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Abstract
A method includes receiving topic names from a metrology interface device, where the topic names correspond to data generated by metrology devices associated with a manufacturing operation. The method also includes accessing a data stream from the metrology interface device. The data stream includes converted metrology data (in a common format) from the metrology devices and corresponding topic names. The method further includes extracting first converted metrology data from the data stream based on a first topic name of the topic names. The first converted metrology data is generated by converting first metrology data from a first metrology device of the metrology devices to the first converted metrology data having the common format. The method also includes comparing the first converted metrology data to a specification, detecting a condition based on the comparison, and sending a command to a manufacturing device based on the condition.
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