Substrate for digital x-ray detector, digital x-ray detector including the same and manufacturing method thereof
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United States of America Patent
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Oct 13, 2020
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Jun 20, 2019
app pub date -
Dec 11, 2018
filing date -
Dec 14, 2017
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Abstract
A substrate for a digital X-ray detector configured to sense an X-ray signal, a detector including the same, and a manufacturing method thereof. According to an embodiment of the present disclosure, the substrate for an X-ray detector includes an interlayer dielectric layer arranged on a thin film transistor, a first passivation layer and a second passivation layer arranged on the interlayer dielectric layer, and a hydrogen blocking layer arranged on at least one of the first passivation layer and the second passivation layer in a transistor region corresponding to the thin film transistor.
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