Scanning electron microscope
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United States of America Patent
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Oct 6, 2020
Grant Date -
Apr 4, 2019
app pub date -
Mar 3, 2017
filing date -
Mar 4, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A scanning electron microscope (1) including a sliding vacuum seal (20) between an electron optical imaging system (2) and a sample carrier (10) with a first plate (22) having a first aperture (24) associated with the electron optical imaging system and resting against a second plate (26) having a second aperture (28) associated with the sample carrier. The first plate and/or the second plate includes a groove (40) circumscribing the first and/or second aperture. The scanning electron microscope may include a detector (8) movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.
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