Apparatus for depositing a polymer coating containing nanomaterial on a substrate
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United States of America Patent
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Oct 6, 2020
Grant Date -
Dec 27, 2012
app pub date -
Sep 10, 2012
filing date -
Jul 8, 2005
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Abstract
An apparatus for depositing a polymer layer containing nanomaterial on a substrate material includes a carrier for carrying the substrate material; a transport structure for providing a polymerization material near a surface of the substrate material and conducting a gas flow near the surface of the substrate material with the gas flow comprising a nanomaterial; and a plasma chamber wherein a plasma electrode structure is arranged for depositing the polymer layer containing nanomaterial on the surface of the substrate material by applying a plasma polymerization process.
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