Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber

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United States of America Patent

PATENT NO 10784085
APP PUB NO 20160225466A1
SERIAL NO

14832280

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Abstract

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An external magnetic filter to trap electrons surrounds a reactor chamber and has multiple magnets arranged in a circle, the magnetic orientation of each individual magnet being rotated relative to the orientation of the adjacent individual magnet by a difference angle that is a function of the arc subtended by the individual magnet.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Collins, Kenneth S San Jose, US 310 28285
Lane, Steven Porterville, US 70 1198
Ramaswamy, Kartik San Jose, US 371 20119
Wong, Lawrence San Jose, US 50 1381
Yang, Yang Los Gatos, US 1214 8701

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