Microelectromechanical switch with metamaterial contacts
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United States of America Patent
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Sep 22, 2020
Grant Date -
Sep 13, 2018
app pub date -
Mar 9, 2018
filing date -
Mar 10, 2017
priority date (Note) -
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Abstract
A microelectromechanical switch having improved isolation and insertion loss characteristics and reduced liability for stiction. The switch includes a signal line having an input port and an output port between first and second ground planes. The switch also includes a beam for controlling activation of the switch. In some embodiments, the switch further includes one or more defected ground structures formed in the first and second ground planes, and a corresponding secondary deflectable beam positioned over each defected ground structure. In some embodiments, the switch includes a metamaterial structure for generating a repulsive Casimir force.
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