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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ASML NETHERLANDS B V	P O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

• G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....
• F16F:SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRAT....
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
• F03G:SPRING, WEIGHT, INERTIA, OR LIKE MOTORS; MECHANICA....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Seijger, Olav Johannes	Veldhoven, NL	9	70
Van, Lankvelt Alexander Petrus Josephus	Veghel, NL	3	3

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Mar 22, 2028
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Mar 22, 2032

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 22, 2020	US,10782620,B2   US10782620B2	GRANTED PATENT AS SECOND PUBLICATION
November 15, 2018	US,20180328434,A1   US20180328434A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent Application No: 10782620

Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device

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