Method of operating a microscope
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United States of America
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Sep 22, 2020
Grant Date -
Jun 21, 2018
app pub date -
Dec 15, 2017
filing date -
Dec 15, 2017
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Abstract
A method of operating a microscope comprises recording a first image I1h of a sample, wherein the first image contains a first feature F1; recording a second image I2h of the sample, wherein the second image contains a second feature F2 arranged at a distance from the first feature; displacing the sample relative to the microscope by a displacement ; recording a third image I3h of the sample, wherein the third image contains the second feature; recording a fourth image I4h of the sample, wherein the fourth image contains a third feature F3 arranged at a distance from the second feature; and determining a position
of the third feature relative to the first feature based on the first, second, third and fourth images.
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