Tool auto-teach method and apparatus
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United States of America Patent
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Sep 8, 2020
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N/A
app pub date -
Aug 13, 2019
filing date -
Nov 10, 2014
priority date (Note) -
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Abstract
A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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