Processing liquid supplying apparatus
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United States of America Patent
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Aug 25, 2020
Grant Date -
Aug 23, 2018
app pub date -
Feb 21, 2018
filing date -
Feb 23, 2017
priority date (Note) -
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Abstract
A processing liquid supplying apparatus including a reservoir containing an additive to be added to a liquid flowing through a passage connected at one end to a liquid supply source and at another end to a processing apparatus; an injection pump for injecting the additive into the passage; a weight measuring unit for measuring the weight of the reservoir and converting the weight into an electrical signal at a predetermined interval while the liquid flows in the passage and the additive is injected; a deciding unit for receiving the electrical signal from the weight measuring unit and deciding whether the measured value of the weight of the reservoir is being reduced at a predetermined rate; and a warning unit for issuing a warning that injection is improper when it is decided by the deciding unit that the measured value of the weight is not being reduced at the predetermined rate.
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