Method for determining the shape of a sample tip for atom probe tomography
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United States of America Patent
Stats
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Aug 18, 2020
Grant Date -
Sep 12, 2019
app pub date -
Mar 7, 2019
filing date -
Mar 8, 2018
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The disclosed technology relates to a method and apparatus for correctly positioning a probe suitable for scanning probe microscopy (SPM). The probe is positioned relative to the apex region of a needle-shaped sample, such as a sample for atom probe tomography, in order to perform a SPM acquisition of the apex region to obtain an image of the region. In one aspect, the positioning takes place by an iterative process, starting from a position wherein one side plane of the pyramid-shaped SPM probe interacts with the sample tip. By controlled consecutive scans in two orthogonal directions, the SPM probe tip approaches and finally reaches a position wherein a tip area of the probe interacts with the sample tip's apex region.
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Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 50.32 % this patent is cited more than
- 5 Age
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