Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product

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United States of America Patent

PATENT NO 10746702
APP PUB NO 20190154636A1
SERIAL NO

16093522

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Abstract

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Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product. This document relates to a method of tuning a scanning probe microscopy system. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to a sample; b) at a first position of the probe tip, sweeping the first frequency across a first frequency range, and obtaining a first signal; c) at a second position of the probe tip, sweeping the first frequency across at least said first frequency range, and obtaining a second signal; d) analyzing the first and second signals to obtain a difference characteristic dependent on the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.

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Patent Owner(s)

Patent OwnerAddress
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNOANNA VAN BUERENPLEIN 1 'S-GRAVENHAGE 2595 DA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Meijer, Timmerman Thijssen Rutger Loosdrecht, NL 4 1
Sadeghian, Marnani Hamed 's-Gravenhage, NL 60 47
van, Es Maarten Hubertus Voorschoten, NL 23 21

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