Inspection-beam shaping on a sample surface at an oblique angle of incidence

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United States of America Patent

PATENT NO 10732424
APP PUB NO 20190250414A1
SERIAL NO

16258543

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Abstract

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A beam shaper for an optical inspection tool includes a focal lens to focus an optical beam onto a target at an oblique angle of incidence and a phase modulator to substantially flatten a top of the optical beam in the plane of the target when the optical beam is focused onto the target at the oblique angle of incidence.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Chunsheng San Jose, US 12 159
Li, Qing San Jose, US 874 8580
Xu, Zhiwei Sunnyvale, US 97 1075

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