Method of measuring 3D profile
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United States of America Patent
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Aug 4, 2020
Grant Date -
Jul 30, 2020
app pub date -
Nov 15, 2019
filing date -
Jan 25, 2019
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Abstract
A 3D profile measurement method includes: forming structured light having a sinusoidal intensity pattern by forcing light to pass through a grating filter and an objective lens; acquiring a structured illumination image of a measurement object by photographing the measurement object with the structured light projected thereon at predetermined intervals in a height direction of the measurement object and a uniform illumination image of the measurement object is acquired by photographing the measurement object under illumination with general light rather than the structured light; generating a Hi-Lo image by using the structured illumination image and the uniform illumination image at each height of the measurement object; extracting height-specific intensity of respective pixels in the plural Hi-Lo images; and generating a 3D profile of the measurement object based on the obtained surface position.
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