Suspended grid structures for electrodes in vacuum electronics
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United States of America Patent
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Jul 21, 2020
Grant Date -
Nov 7, 2019
app pub date -
Jul 17, 2019
filing date -
Jul 22, 2017
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Abstract
Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a first film layer disposed on the electrode about a periphery of the electrode; and a second film layer disposed on the first film layer, the second film layer including a plurality of electrically conductive grid lines patterned therein that are supported only at the periphery of the electrode by the first film layer.
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