Metal protective layer for electron emitters with a diffusion barrier

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United States of America Patent

PATENT NO 10714294
SERIAL NO

16419184

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Abstract

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An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Delgado, Gildardo R Livermore, US 24 107
Garcia, Rudy F Union City, US 29 201
Hill, Frances Sunnyvale, US 11 26
Ioakeimidi, Katerina San Francisco, US 11 13
Lopez, Lopez Gary V Sunnyvale, US 10 3
Marks, Zefram Fremont, US 7 8
Romero, Michael E San Jose, US 7 10

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