Polishing pad and polishing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jul 7, 2020
Grant Date -
Jul 12, 2018
app pub date -
Jan 5, 2018
filing date -
Jan 6, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Calculated Rating
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US Family Size
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Non-US Coverage
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Abstract
The present invention relates to a polishing having a polishing layer, an elastic base layer and a binder layer. The binder layer binds the elastic base layer to the polishing layer. A compressibility of the elastic base layer is greater than a compressibility of the polishing layer. The present invention further provides a polishing apparatus and a method for polishing a substrate.
First Claim
Other Claims data not available
Family
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| TW | B | TWI621501 | Jan 06, 2017 |
| CN | A | CN108274387 | May 03, 2017 |
International Classification(s)
- 2018 Application Filing Year
- B24B Class
- 755 Applications Filed
- 524 Patents Issued To-Date
- 69.41 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B24B Class
- 0 % this patent is cited more than
- 5 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jan 7, 2028 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 7, 2032 |
