Substrate processing method
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United States of America Patent
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Jun 30, 2020
Grant Date -
Mar 1, 2018
app pub date -
Aug 11, 2017
filing date -
Aug 31, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate processing method includes a forcing member disposing step of disposing a facing member such that the facing member faces an upper surface of a horizontally held substrate; a space forming step of forming a space where movement of the atmosphere in from and out to an outside is restricted by the substrate, the facing member, and a guard that surrounds the substrate and the facing member in plan view; an inert gas supplying step of supplying an inert gas to the space; an interval adjusting step of adjusting an interval between the upper surface of the substrate and the facing member by relatively raising/lowering the facing member with respect to the substrate while maintaining the space; and a processing liquid supplying step of supplying a processing liquid to the upper surface of the substrate after the interval adjusting step.
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