Scanning probe microscope

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United States of America Patent

PATENT NO 10697997
APP PUB NO 20190293680A1
SERIAL NO

16302759

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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When trace image data is obtained while a probe is used to scan a region on a sample in a forward direction and retrace image data is obtained while the same region is scanned in the reverse direction, a deviation information storage unit stores deviation detected by a deviation detection unit. This deviation is an indication of the difference between the distance between the probe and the sample and a target value for the distance at a given point in time. An image data selection unit compares the deviation during forward scanning and the deviation during reverse scanning for each measurement point, selects the image data obtained during scanning that has the smaller deviation, and stores the same to a storage region of an image data storage unit as selected image data.

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Patent Owner(s)

Patent OwnerAddress
SHIMADZU CORPORATIONKYOTO-SHI KYOTO 604-8511

International Classification(s)

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  • 2016 Application Filing Year
  • G01Q Class
  • 118 Applications Filed
  • 104 Patents Issued To-Date
  • 88.14 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2016201720182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Hiroshi Kyoto, JP 137 1407

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