Wavefront correction element for use in an optical system
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United States of America Patent
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Jun 16, 2020
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N/A
app pub date -
Oct 8, 2019
filing date -
Apr 11, 2017
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Abstract
A wavefront correction element for use in an optical system, in particular in an optical system of a microlithographic projection exposure apparatus, includes a substrate (220, 230), an arrangement of electrically conductive conductor tracks (222, 232) provided on the substrate, wherein a wavefront of electromagnetic radiation incident on the wavefront correction element is manipulatable by electrical driving of the conductor tracks, and an insulating layer (221, 231), which electrically insulates the conductor tracks from one another, wherein the insulating layer has first regions and second regions, wherein the electrical breakdown strength of the insulating layer to withstand a breakdown of electrical charge through the insulating layer as far as the arrangement of conductor tracks is lower in the second regions than in the first regions by at least a factor of two.
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