Imaging a gap between sample and probe of a scanning probe microscope in a substantially horizontal side view

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United States of America Patent

PATENT NO 10684307
APP PUB NO 20180143221A1
SERIAL NO

15817448

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Abstract

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A scanning probe microscope analyses a sample by moving a probe and the sample relative to one another. The scanning probe microscope includes a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view.

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Patent Owner(s)

Patent OwnerAddress
ANTON PAAR GMBHANTON-PAAR-STRASSE 20 GRAZ-STRASSGANG A-8054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brandner, Markus Raaba-Grambach, AT 3 16
Gomez-Casado, Alberto Seiersberg-Pirka, AT 3 5
Koller, Daniel Graz, AT 7 36

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