Lithographic apparatus and device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10678139
APP PUB NO 20190250518A1
SERIAL NO

16245400

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A lithographic projection apparatus is disclosed in which a space between the projection system and a sensor is filled with a liquid.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL - 5504 DR

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bijlaart, Erik Theodorus Maria Rosmalen, NL 28 1779
Butler, Hans Best, NL 166 2708
De, Smit Joannes Theodoor Eindhoven, NL 50 5946
Den, Boef Arie Jeffrey Waalre, NL 263 4891
Donders, Sjoerd Nicolaas Lambertus 's-Hertogenbosch, NL 253 8312
Hoogendam, Christiaan Alexander Veldhoven, NL 205 9950
Kolesnychenko, Aleksey Yurievich Helmond, NL 68 2643
Kroon, Mark Utrecht, NL 29 1005
Lof, Joeri Eindhoven, NL 94 8170
Loopstra, Erik Roelof Heeze, NL 325 13468
Meijer, Hendricus Johannes Maria Veldhoven, NL 45 2812
Mertens, Jeroen Johannes Sophia Maria Duizel, NL 160 6273
Mulkens, Johannes Catherinus Hubertus Waalre, NL 3 5
Ottens, Joost Jeroen Veldhoven, NL 131 2979
Ritsema, Roelof Aeilko Siebrand Eindhoven, NL 37 4991
Sengers, Timotheus Franciscus 's-Hertogenbosch, NL 61 3237
Simon, Klaus Eindhoven, NL 89 7360
Straaijer, Alexander Eindhoven, NL 87 8017
Streefkerk, Bob Tilburg, NL 201 10575
Van, De Kerkhof Marcus Adrianus Helmond, NL 125 1774
Van, Santen Helmar Amsterdam, NL 101 4784
Van, Schaik Frank Eindhoven, NL 22 882

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