Hard coating and hard coating-covered member
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United States of America Patent
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Jun 9, 2020
Grant Date -
Sep 6, 2018
app pub date -
Sep 4, 2015
filing date -
Sep 4, 2015
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Abstract
A hard coating, which is to disposed to cover a surface of a tool substrate, has a total thickness of 0.5-20 μm and includes an A layer and nanolayer-alternated layer that are alternately laminated by physical vapor deposition. The nanolayer-alternated layer includes a B layer and C layer that are alternately laminated. The A layer has a thickness of 50-1000 nm and is AlCr(SiC) nitride that is represented by a composition formula of [Al1-W-XCrW(SiC)X]N wherein an atomic ratio W is 0.20-0.80 and an atomic ratio X is 0.01-0.20. The B layer has a thickness of 1-100 nm and is TiAl nitride that is represented by a composition formula of [Ti1-YAlY]N wherein an atomic ratio Y is 0.30-0.85. The C layer has a thickness of 1-100 nm and is Ti(SiC) nitride represented by a composition formula of [Ti1-Z(SiC)Z]N wherein an atomic ratio Z is 0.05-0.45. The nanolayer-alternated layer has a thickness of 50-1000 nm.
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