Integrated circuit tester probe contact liner
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United States of America Patent
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Jun 2, 2020
Grant Date -
Nov 21, 2019
app pub date -
May 15, 2018
filing date -
May 15, 2018
priority date (Note) -
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Abstract
An integrated circuit (IC) device tester includes contact probes. A liner is formed upon the contact probes. The liner includes a matrix of an electrical conductor and glass. The conductor of the liner provides for the contact probe to be electrically connected to the IC device contact. The glass of the liner prevents IC device contact material adhering thereto. The liner may be formed by applying a conductive glass frit upon a probe card that includes the probe contacts and locally thermally conditioning the conductive glass frit upon contact probes. By locally thermally conditioning the conductive glass frit, the temperature of the probe card may be maintained below a critical temperature that damages the probe card.
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