Nanostructured nickel oxide environmental sensor device and a package for encapsulating the device
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United States of America Patent
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Jun 2, 2020
Grant Date -
Dec 13, 2018
app pub date -
Nov 30, 2016
filing date -
Nov 30, 2015
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Abstract
A nanostructured environmental sensor includes a silicon based substrate, a structural base located above the substrate, and a sensor portion suspended above the structural base. A top surface of the sensor portion is formed from nickel oxide using atomic layer deposition. The nanostructured thin film nickel oxide environmental sensor is provided in a housing to form an environmental sensor package for sensing attributes of the environment to which the environmental sensor package is exposed.
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