Superconducting integrated circuit

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United States of America Patent

PATENT NO 10658424
APP PUB NO 20180247974A1
SERIAL NO

15745914

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Abstract

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A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called “device”) is provided as a substantially high quality factor, low loss superconducting device.

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Patent Owner(s)

Patent OwnerAddress
MASSACHUSETTS INSTITUTE OF TECHNOLOGY77 MASSACHUSETTS AVENUE CAMBRIDGE MA 02139

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bolkhovsky, Vladimir Framingham, US 8 90
Das, Rabindra N Lexington, US 53 1420
Gouker, Mark A Belmont, US 12 481
Hover, David J Somerville, US 2 56
Miloshi, Xhovalin Needham, US 1 49
Oliver, William D Arlington, US 13 342
Rosenberg, Danna Arlington, US 9 406
Stull, Corey W Leominster, US 1 49
Yoder, Jonilyn L Billerica, US 1 49

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