Capacitors and radio frequency generators and other devices using them
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United States of America Patent
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May 12, 2020
Grant Date -
May 24, 2018
app pub date -
Sep 26, 2017
filing date -
Sep 27, 2016
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Abstract
Certain configurations of a stable capacitor are described which comprise electrodes produced from materials comprising a selected coefficient of thermal expansion to enhance stability. The electrodes can be spaced from each other through one of more dielectric layers or portions thereof. In some instances, the electrodes comprise integral materials and do not include any thin films. The capacitors can be used, for example, in feedback circuits, radio frequency generators and other devices used with mass filters and/or mass spectrometry devices.
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