Dense arrays and charge storage devices

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United States of America Patent

PATENT NO 10644021
APP PUB NO 20180254286A1
SERIAL NO

15971293

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Abstract

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There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

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Patent Owner(s)

Patent OwnerAddress
WODEN TECHNOLOGIES INC251 LITTLE FALLS DRIVE WILMINGTON DE 19808

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kouznetsov, Igor G Santa Clara, US 32 833
Lee, Thomas H Cupertino, US 90 7474

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