Semiconductor device including circuit having security function

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10636751
APP PUB NO 20190019766A1
SERIAL NO

15750614

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Abstract

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A semiconductor device 100 of the present invention includes a front end and back ends A and B, each including a plurality of layers. Further, in the plurality of layers of the back end B, (i) circuits 22, 23, and 24 having a security function are provided in at least one layer having a wiring pitch of 100 nm or more, (ii) a circuit having a security function is provided in at least one wiring layer in M5 or higher level (M5, M6, M7, . . . ), (iii) a circuit having a security function is provided in at least one layer, for which immersion ArF exposure does not need to be used, or (iv) a circuit having a security function is provided in at least one layer that is exposed by using an exposure wavelength of 200 nm or more.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY1-3-1 KASUMIGASEKI CHIYODA-KU TOKYO 1000013

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Endo, Kazuhiko Tsukuba, JP 49 1259
Fukuda, Koichi Tsukuba, JP 238 2322
Hori, Yohei Tsukuba, JP 3 16
Irisawa, Toshifumi Tsukuba, JP 16 504
Katashita, Toshihiro Tsukuba, JP 7 234
Koike, Hanpei Tsukuba, JP 9 104
Liu, Yongxun Tsukuba, JP 12 221
Maeda, Tatsuro Tsukuba, JP 11 90
Masahara, Meishoku Tsukuba, JP 13 192
Ogasahara, Yasuhiro Tsukuba, JP 1 2
Ota, Hiroyuki Tsukuba, JP 119 1580
Ouchi, Shinichi Tsukuba, JP 14 135
Yasuda, Tetsuji Tsukuba, JP 24 107

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