Imaging systems with through-oxide via connections

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United States of America Patent

PATENT NO 10622391
APP PUB NO 20170179176A1
SERIAL NO

15453038

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Abstract

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An imaging system may include an image sensor package with through-oxide via connections between the image sensor die and the digital signal processing die in the image sensor package. The image sensor die and the digital signal processing die may be attached to each other. The through-oxide via may connect a bond pad on the image sensor die with metal routing paths in the image sensor and digital signal processing dies. The through-oxide via may simultaneously couple the image sensor die to the digital signal processing die. The through-oxide via may be formed through a shallow trench isolation structure in the image sensor die. The through-oxide via may be formed through selective etching of the image sensor and digital signal processing dies.

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Patent Owner(s)

  • SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Borthakur, Swarnal Boise, US 105 869
Korobov, Vladimir San Mateo, US 23 394
Sulfridge, Marc Boise, US 37 720

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