Substrate processing apparatus
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United States of America Patent
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Apr 14, 2020
Grant Date -
Nov 14, 2019
app pub date -
May 23, 2019
filing date -
May 14, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
Examples of an insulation system include a digital isolator for receiving supply of a first power supply on an input side thereof and receiving supply of a second power supply on an output side thereof, and an output adjusting unit for receiving supply of the second power supply, directly outputting an output of the digital isolator when a voltage of the second power supply is larger than a predetermined voltage, and stopping data output irrespective of the output of the digital isolator when the voltage of the second power supply is smaller or equal to the predetermined voltage.
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