Facet mirror

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United States of America

PATENT NO 10599041
APP PUB NO 20150049321A1
SERIAL NO

14529844

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Abstract

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Illumination optical unit for illuminating an object field in a projection exposure apparatus, comprising a first facet mirror with a structure, which has a spatial frequency of at least 0.2 mm−1 in at least one direction, and a second facet mirror, comprising a multiplicity of facets, wherein the facets are respectively provided with a mechanism for damping spatial frequencies of the structure of the first facet mirror.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bieling, Stig Aalen, DE 23 115
Deguenther, Markus Aalen, DE 127 1347
Wangler, Johannes Koenigsbronn, DE 105 1917

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